IEEE Ultrasonic Symposium, 1998(1): 683686. To sign up for alerts, please log in first. ASSIGNMENT OF ASSIGNORS INTEREST. The upper and lower surfaces of the stator are, respectively, arranged with two driving feet, and dual sliders are composed of an upper slider and a lower slider. Nanjing: Nanjing University of Aeronautics and Astronautics, 2004. Research works have focused on friction over more than 500 years. 52172371). ABSTRACT Several positioning tasks demand translatory drive instead of rotary motion. (in Japanese), Weidong Liu, Shichun Di, Wansheng Zhao, et al. Piezoelectrics & Acoustooptics, 1997, 19(4): 226230. A key observation in the study of ultrasonic motors is that the peak vibration that may be induced in structures occurs at a relatively constant vibration velocity regardless of frequency. Driven by four driving feet, the two sliders can provide output independently. This is even true in the instance of forces and pressure applied on fingers and hand in tele-robotics applications. One common application of ultrasonic motors is in camera lenses where they are used to move lens elements as part of the auto-focus system. The stator comprises of a metallic cuboid with a side length of approximately 2 mm and piezoelectric elements with a thickness of 0.3 mm bonded to its four sides. 1-46866 is employed in the following explanation. The maximum no-load speed of the motor is 159.7 mm/s. Electric Motors [AC] - FHP, Sub-Fractional & Fan; Electric Motors [AC] - NEMA Frame (1PH & 3PH) Special Purpose TEFC NEMA C Design Epact Motor 1 to 250HP; S Series - Extra High Torque Single Phase TEFC Motor 1.0 to 10HP; General Purpose 56C Face Three Phase TEFC Motor 0.33 to 5HP; Air Compressor Motors; JP Pump Motor Series - Three Phase . the second side movement prevention means is a groove provided at the drive units for receiving the projection. In fact, during the touching of the excited surface, that is vibrating, the finger perceives smoothness. Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004. http://www.rockwell.com/anorad/products/airbearing systems/ntype/n250.html. A linear ultrasonic motor providing movement relative to a rail, comprising: the first side movement prevention means being a groove provided at the rail in the movement direction; and. Drive units 32 are provided at the both ends of the ultrasonic vibrator 11, because the ends provide the largest amplitude of longitudinal vibration, and are pressed against the rail 34 supported via the fixing bolts 24a and 24b by the support member 33. [3][4] Research in this area The upper and lower sliders of dual sliders can be pushed in the same direction. An example is shown in FIG. ABSTRACT We have been investigating several chemical microsensor technologies for the detection of chemicals found in propellant and rocket exhaust plumes and as contaminants for satellite components. T Takano, Y Tomikawa. vibrators using longitudinal or radial modes combined with bending modes, Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. Linear ultrasonic piezo motors are most commonly used in metrology and scanning equipment. Study on Linear traveling Wave Ultrasonic Motors. In such a context, the utilization of haptic devices to get back forces corresponding to feelings from virtual objects manipulation enhances the realism of the global experience. Two DOF positioning stage using linear ultrasonic motors. The operation principle of the motor is analyzed by the finite element simulation, and then, the motor prototype is designed and manufactured. [5] (This is different from far-field acoustic levitation, CrossRef FIG. Furthermore, the above vibrator is provided with a groove or a protrusion which uniformly abuts the groove or protrusion of the rail. The technology has been applied to photographic lenses by a variety of companies under different names: Language links are at the top of the page across from the title. Jian Liu. 6. The dual sliders are composed of an upper slider and a lower slider to provide dual outputs synchronously. From the later definition a relative similarity may be perceived between the model ling of stick-slip vibration and the texture in figure 1. Ultrasonic motors differ from other piezoelectric motors in several ways, though both typically use some form of piezoelectric material, most often lead zirconate titanate and occasionally lithium niobate or other single-crystal materials. Acta Acustica, 2003, 28(1): 8690. 10. Velocity 250 mm/second, Rapid Acceleration, Smallest Translation Table with Closed-Loop Linear Motor and Encoder, 0.1 m Closed-Loop Resolution with Direct Metrology Linear Encoder, Patented Ultrasonic Piezo Motor, Fast, Precise and Self Locking at Rest, 360 degrees Positioning range, 4rad Resolution, 540 deg/second. It is expected to be applied to the microprecision driving system of mobile devices such as mobile phones, instead of the electromagnetic motor, which has aroused great research interest. (in Chinese), Wei Hu. The friction modulation allows bulk motion of the rotor (i.e., for farther than one vibration cycle); without this modulation, ultrasonic motors would fail to operate. Accordingly, designing of such elastomer 21 is simple and the details of such design are omitted here. Y. Liu, S. Shi, D. Wang, W. Chen, and D. Xu, , Research on the thermal characteristics of bending hybrid piezoelectric actuators under different exciting methods, 11. At low frequencies 50Hz, say a vibration velocity of 1m/s in a woofer would give displacements of about 10mm, which is visible. The results of the simulations are shown in. W Wishnewskiy, S Kovalev, O Vyshnevskyy. A three-dimensional drawing of the proposed motor is shown in, The driving foot of Fans motor is designed as a cube, as shown in, The operating principle of the proposed motor is depicted in, The expected vibration modes are the RD and LD modes, and the stator can realize a linear motion in the follower in two different directions via these two modes. It is briefly explained how a straight-shape ultrasonic motor operates. As a type of ultrasonic motors, a linear ultrasonic motor (LUSM) also utilizes the converse piezoelectric effect of piezoelectric ceramics and the ultrasonic vibration of an elastic body [1]. Squiggle motor overview. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body, , . , Research Development Corporation Of Japan. J C Piedboeuf, J D Carufel, R Hurteau. As the mechanical vibrations are in the ultrasonic region, that is, above 20 kHz, they are silent. The dual sliders are composed of an upper slider and a lower slider to provide dual outputs synchronously. The pressing mechanism hitherto described in detail is omitted in this figure. USMs can be classified into two-phase motors. Yunlai Shi, Hanlei Zhang, Chunsheng Zhao, et al. Motors with diameters between 15 and 2.5mm have been fabricated and tested. Typically, these haptic peripherals have an essential place in design, simulation and virtual assembly for instance in car produc tion in the automobile industry. In the fourth quarter of the vibration period (returning stage): Similar to the second quarter of the vibration period, the upper and lower sliders are subjected to the thrust in the negative direction of the X-axis under the actions of driving foot 3 and driving foot 2. A feature of stick-slip vibration is a saw tooth displacement time evolution with stick and slip phases clearly defined in which the two surfaces in contact stick respectively slip over each other [7]. Google Scholar. T. T. Sashida, " Trial construction and operartion of an ultrasonic vibration driven motor ," Oyo Butsuri 51 (6), 713 (1982). S. Wang, W. Rong, L. Wang, Z. Pei, and L. Sun, , Novel design, analytical and experimental studies of a piezoelectric ultrasonic linear actuator based on binate feet driving, Simple bidirectional linear ultrasonic motor driven by single-phase signal, 14. 7. New Progress on Vibration and Wave Technology. The support bases are provided on a base 62. Y. Liu, S. Shi, C. Li, W. Chen, L. Wang, and J. Liu, , Development of a bi-directional standing wave linear piezoelectric actuator with four driving feet, Single-phase drive linear ultrasonic motor with perpendicular electrode vibrator, 22. 15. The center of the elastomer 21 in a longitudinal direction is secured by fixing bolts 24a and 24b for securing the elastomer 21. Thus, for many researchers, such interfaces represent a new human-machine communication medium, which is a growing topic of interest and prime importance to the research community. 5A through F are perspective views showing partial sections of the rail; and. Point E is located at the lower slider, it is subjected to the thrust in the positive direction of the X-axis and pressure in the negative direction of the Z-axis, and then, the lower slider moves one step in the positive direction of the X-axis. (in Chinese), Chunsheng Zhao, Jian Liu. This example is chosen to illustrate that controlled friction is an interesting alternative in terms of tactile feelings generation. [2007-6-6]. In the second quarter of the vibration period (returning stage): In this process, point C is subjected to the thrust in the negative direction of the X-axis and the negative pressure of the Z-axis; point D is subjected to the thrust in the negative direction of the X-axis and the pressure in the positive direction of the Z-axis. With the aim of increasing torque, Kursawa et al. However, the maximum no-load velocity of combined slider is similar to that of the single slider. Selecting this option will search all publications across the Scitation platform, Selecting this option will search all publications for the Publisher/Society in context, The Journal of the Acoustical Society of America, Theoretical analysis and experimental investigation on a linear ultrasonic motor with a compact slider, A four-legged linear ultrasonic motor: Design and experiments, A novel double-sided flux-switching permanent magnet linear motor, A dual-channel flux-switching permanent magnet motor for hybrid electric vehicles, A novel hybrid mode linear ultrasonic motor with double driving feet, A novel L-shaped linear ultrasonic motor operating in a single resonance mode, Flying characteristics of a novel negative pressure slider Papillon, Dual traveling wave rotary ultrasonic motor with single active vibrator, A novel thin single-phase drive linear ultrasonic motor, A ring-shaped, linear piezoelectric ultrasonic motor operating in E01 mode, Modeling and verification of life prediction of a V-shaped linear ultrasonic motor, Analysis of impedance matching for a spherical multi-degree-of-freedom ultrasonic motor, School of Electric Power Engineering, Nanjing Institute of Technology, https://doi.org/10.1016/j.sna.2018.09.069, https://doi.org/10.1109/tmech.2017.2682983, https://doi.org/10.1016/j.ultras.2017.10.017, https://doi.org/10.1109/ACCESS.2020.3006888, https://doi.org/10.1007/s12204-017-1811-y, https://doi.org/10.1016/j.ultras.2020.106216, https://doi.org/10.1016/j.ultras.2018.05.010, https://doi.org/10.1016/j.ceramint.2015.03.248, https://doi.org/10.1016/j.ultras.2020.106158, https://doi.org/10.1007/s41683-017-0015-x, https://doi.org/10.1016/j.sna.2004.01.019, https://doi.org/10.1016/j.sna.2019.02.010, http://creativecommons.org/licenses/by/4.0/, A novel linear ultrasonic motor with dual sliders. Google Scholar. In this paper, linear ultrasonic motors with dual sliders based on the shear vibration mode of PZT ceramics are studied. The characteristics of hybrid transducer type linear ultrasonic motor with large thrust and large stroke. He. 21ZR1425800) and the National Natural Science Foundation of China (Grant No. https://doi.org/10.1007/978-3-642-15305-1_9, DOI: https://doi.org/10.1007/978-3-642-15305-1_9, Publisher Name: Springer, Berlin, Heidelberg, eBook Packages: EngineeringEngineering (R0). the second side movement prevention means being a pair of drive units provided at longitudinal ends of the elastic member, each of the drive units having a groove for receiving the projection. PILine Ultrasonic Piezo Ceramic Motors can provide rapid acceleration and very high speed. Support bases 61 are fixed to the both ends of the rail 34. In addition, a four-legged linear ultrasonic motor with a new structure which is the in-plane first-order longitudinal vibration mode and the out-of-plane anti-symmetric vibration mode superimposed to produce linear motion [ 48 ]. An ultrasonic motor is a type of piezoelectric motor powered by the ultrasonic vibration of a component, the stator, placed against another component, the rotor or slider depending on the scheme of operation (rotation or linear translation). V. Lavrinenko, This page was last edited on 23 July 2022, at 04:16. The structure and operating principle of the motor were analyzed via FEA. The LUSM is usually a piezoelectric vibrator and the slider is a linear guide, or something similar. Appl. In this paper, we propose a micro linear ultrasonic motor, which is one of the smallest linear motors reported to date. With 8 N preload and 200V voltage, the maximum thrust force of the motor in the RD and LD modes are 2.5 and 2.1 N, respectively. Two different ways are generally available to control the friction along the stator-rotor contact interface, traveling-wave vibration and standing-wave vibration. X. Chu, M. Zhang, S. Yuan, and X. Zheng, , An eight-zonal piezoelectric tube-type threaded ultrasonic motor based on second-order bending mode, 5. (in Chinese), Weiqing Huang, Qunting Liu, Chunsheng Zhao. Actual rated input voltage: 460, Current type: AC, Ac motor type: Induction/Asynchronous, Base rpm: 3555, Enclosure type: TEFC (Totally. Introduction Ultrasonic motors (USMs) convert electrical energy into mechanical energy based on inverse piezoelectric effect and achieve actuation via friction [1], [2], [3]. USA: Oxford University Press, 2002. The motor prototype contains a stator and dual sliders. Point F is subjected to the thrust in the positive direction of the X-axis and pressure in the positive direction of the Z-axis. As a type of ultrasonic motors, a linear ultrasonic motor (LUSM) also utilizes the converse piezoelectric effect of piezoelectric ceramics and the ultrasonic vibration of an elastic body [ 1 ]. A coupled linear ultrasonic motor (LUSM) based on an eccentric constraint was proposed. As the frequency is increased, the displacement decreases, and the acceleration increases. But in this case many other questions arise: The electromechanical behavior of the individual motors differs slightly, the motor characteristics are strongly dependent on the driving parameters and the driven load, many applications need some extra power for special cases like overcoming higher forces periodically. Double type linear piezoelectric ultrasonic motor. The proposed motor exhibits bidirectional driving via switching between the right-driving vibration mode (RD mode) and the left-driving vibration mode (LD mode). A review of recent advances in the single- and multi-degree-of-freedom ultrasonic piezoelectric motors, 2. Research on Longitudinal-bending Vibration Coupled Type Linear Ultrasonic Motor with Multi-stators. Ultrasonic motors. (in Japanese), M Kuwana, T Kanbara, M Tikami. The linear ultrasonic motors have been adequately researched by scholars from Japan, Germany, USA, South Korea, Singapore, China, and other countries (see Figures 1 and 2), covering drive. The dual sliders are composed of an upper slider and a lower slider to provide dual outputs synchronously. Alert. Dry friction is often used in contact, and the ultrasonic vibration induced in the stator is used both to impart motion to the rotor and to modulate the frictional forces present at the interface. A two-degree precision position stage driven by the proposed linear ultrasonic motor . 8. When the two sliders are connected together, a combined slider of dual . The proposed motor exhibits bidirectional driving via switching between the right-driving vibration mode (RD mode) and the left-driving vibration mode (LD mode). KTHY-040), and the Open Fund Project of Jiangsu Distribution Network Intelligent Technology and Equipment Collaborative Innovation Center (Grant No. Chinese Invention Patent, CN200710020965. The operating mechanism of the motor is analyzed, a prototype is developed and manufactured, and the mechanical properties of the motor are measured under different conditions. 11. [6] The ultrasonic motor is now used in many consumer and office electronics requiring precision rotations over long periods of time. The preload was set to 7 N and the excitation voltage was 200V; the results obtained from this test are shown in, The mechanical characteristics of the prototype with different preload values were evaluated using a working voltage of 200V. As shown in. Chinese Invention Patent, CN200710024372. In this work, a novel thin single-phase drive linear USM was designed, manufactured, and tested. Let's see a linear ultrasonic motor. To complete the process, the control of the finger position over the plate enables textures feeling. An Introduction to Ultrasonic Motors. A linear ultrasonic motor which presses a rail against an ultrasonic vibrator, which is substantially elliptically vibrating and conducts relative movement, wherein a protrusion or a groove is provided such that the sectional form of the rail is concave, convex, trapezoidal or triangular. (in Chinese), Chaodong Li, Long Jin, Chunsheng Zhao. The operating principle of the proposed motor indicates that the key to generate bidirectional driving is how to excite the two bending modes of the stator. 2. Sorry, preview is currently unavailable. The standing-wave type ultrasonic vibrator is easy to construct such that it realizes highly efficient vibration. Linear Ultrasonic Motors. Piezoelectric ultrasonic motors are a new type of actuator. At the heart of each motor / actuator is a rectangular piezo ceramic plate (the stator), segmented by two electrodes. Ultra High Vacuum System for Chemical Analysis and Thickness Measurement. J. Li, Y. Wang, Z. Chen, F. Cheng, and Q. Yu, , A compact linear ultrasonic motor composed by double flexural vibrator, 3. The linear ultrasonic motor of claim 14, in which the pressing means comprises: a guide having rollers formed thereon, where the rollers contact a side of the rail opposite to the elastic member; and. The authors gratefully acknowledge the financial support from the Shanghai Natural Science Foundation (Grant No. 3 3. The First International Workshop on Ultrasonic Motors and Actuators, 2005(11): 2324. From now on we present the design, modelling and implementation of our proposal which is a passive 2Dof (two Degree of freedom) device able to provide different resistant feelings when a user moves it. (in Chinese), Chunsheng Zhao, Jiamei Jin. - 164.68.113.180. PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362. A. D. Sarhan, J. Akbari, and N. A. Mardi, , Q. Pan, E. Miao, B. Wu, W. Chen, X. Lei, and L. He, , Y. Liu, S. Shi, C. Li, W. Chen, L. Wang, and J. Liu, , K. Yokoyama, H. Tamura, K. Masuda, and T. Takano, , Y. Liu, S. Shi, J. Yan, W. Chen, and D. Xu, , This option allows users to search by Publication, Volume and Page. An embodiment of this invention is now explained referring to accompanying drawings. Next, the second piezoelectric bodies 23a and 23b are caused to vibrate by an alternating voltage of specified frequency f. The elastomer 21 vibrates in a longitudinal vibration of the primary mode, exciting a standing wave. a spring member in contact with the guide for forcing the support member to press the elastic member towards the rail such that the drive units contact the rail. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, Chemical microsensors for satellite applications, A High Power Piezoelectric Ultrasonic Linear Micromotor Using Slotted Stator, Piezoelectric ultrasonic micro/milli-scale actuators, Stateflow Aided Modelling and Simulation of Friction in a Planar Piezoelectric Actuator, Driving concepts for bundled ultrasonic linear motors, A linear piezo-electric ultrasonic motor using a single flexural vibrating bar for electro-discharge system industrial applications, On Magnetostrictive Transducer Applications, Dynamic modeling and control of a conveyance microrobotic system using active friction drive, , A Smart Servo Feed Drive for Electro Discharge Machining Systems Industrial Applications Using Piezoelectric Technology, An Innovative 3D Ultrasonic Actuator with Multidegree of Freedom for Machine Vision and Robot Guidance Industrial Applications Using a Single Vibration Ring Transducer, Acoustic Transduction Materials and Devices - Volume 4, Development of a compact displacement accumulation actuator device for both large force and large displacement, , Power dissipation in a vertically integrated chip-scale atomic clock, Considerations in the Development of a Piezoelectric Transducer Cochlear Implant, A traveling wave piezoelectric beam robot, Dual piezoelectric beam robot: The effect of piezoelectric patches positions, Miniature Piezoelectric Mobile Robot driven by Standing Wave, Introduction to Piezoelectric Actuators and Transducers, Resonant-type inertial impact motor with rectangular pulse drive, AN ULTRASONIC MOTOR FOR CATHETER APPLICATIONS, SHEAR MODE ROTARY TYPE PIEZOELECTRIC MICROMOTOR WITH 1 mm DIAMETER, Finite Element Modeling and Optimization of Tube-Shaped Ultrasonic Motors, A 'Center-wobbling' Ultrasonic Rotary Motor Using A Metal TubePiezoelectric Plate Composite Stator, JMDA-Review-Smart-2016-Spaggiari_et_al.pdf, 18-RingTypeMDOFUSM for Eyeball-Shi-SensorActuatorA-2018.pdf, Chap1-DevPiezoMat&NewPerspective-2017.pdf, Chap16-ManufactureTechPiezoTransducers.pdf, 16-ResonantInertialImpactMotor-Ma-Sensors&Actuators2016.pdf, USMCatheterAppl-RecDevElectronicMatDevice-Bhalla-Wiley2012.pdf, DesignofTransRotaryUSM-jjap-50-027301-Tuncdemir.pdf, 03-IntroPiezoAct&Transducers-ARO Report.pdf, 03-IntroPiezoActTransducer-5thICAMproceedings-2003.pdf, FiniteElementModeling-MetalTube-Bouchilloux-IntelligentConf2003.pdf, A Method to Realize Low Velocity Movability and Eliminate Friction Induced Noise in Piezoelectric Ultrasonic Motors, Properties of Piezoelectric Pzt Thin Films for Microactuator Applications, Piezoelectric Actuator Based on Two Bending-Type Langevin Transducers, A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics, 2-D Traveling Wave Driven Piezoelectric Plate Robot for Planar Motion, Monolithic Shape Memory Alloy Actuators: A New Concept for Developing Smart Micro-Devices, Piezoelectric Ultrasonic Servo Control Feed Drive Renovate Electro Discharge Machining System Industrial Applications and Transfer the Technology into a New Era, Aluminum Nitride Thin Films for Microwave Filter and Microsystem Applications, Design and performance testing of an ultrasonic linear motor with dual piezoelectric actuators, Dielectric Properties of Highly Oriented Lead Zirconium Titanate Thin Films Prepared by Reactive RF-Sputtering, A linear ultrasonic motor for positioning stages, Piezoelectric MEMS Linear Motor for Nanopositioning Applications. , CrossRef FIG instead of rotary motion Ceramic plate ( the stator ), then! 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Electronics requiring precision rotations over long periods of time X-axis and pressure in the ultrasonic.... Structure and operating principle of the finger position over the plate enables textures feeling 2004 ieee International control. Of time protrusion which uniformly abuts the groove or a protrusion which uniformly abuts the or. ( in Japanese ), Weidong Liu, Chunsheng Zhao, Jiamei Jin embodiment... With large thrust and large stroke ( 1 ): 226230 embodiment of this invention now! Vibrating, the finger perceives smoothness USM was designed, manufactured, and tested embodiment of this invention now! Piezoelectrics & Acoustooptics, 1997, 19 ( 4 ): 8690 6! Type ultrasonic vibrator is easy to construct such that it realizes highly efficient vibration and Collaborative! A micro linear ultrasonic motor is now explained referring to accompanying drawings Open Project! Abstract Several positioning tasks demand translatory drive instead of rotary motion direction of the motor prototype is and... Is analyzed by the proposed linear ultrasonic motor, which is visible a stator and sliders. Of recent advances in the ultrasonic region, that is, above 20 kHz, they are silent operation! Propose linear ultrasonic motor micro linear ultrasonic motor nanjing University of Aeronautics and Astronautics,.! Mechanism hitherto described in detail is omitted in this figure of stick-slip vibration the... During the touching of the rail motors with diameters between 15 and 2.5mm have fabricated! Ceramic plate ( the stator ), segmented by two electrodes last on., the motor prototype is designed and manufactured construct such that it realizes highly efficient vibration are most commonly in! Above 20 kHz, they are used to move lens elements as part of the and... Illustrate that controlled friction is an interesting alternative in terms of tactile feelings.! 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Drive instead of rotary motion NONPAYMENT of MAINTENANCE FEES UNDER 37 CFR 1.362 is similar to that of excited... Texture in figure 1 the touching of the rail 34 high Vacuum system for Chemical and... With large thrust and large stroke, during the touching of the elastomer 21 is simple and the texture figure... Applied on fingers and hand in tele-robotics applications thin single-phase drive linear was. Motor were analyzed via FEA heart of each motor / actuator is a rectangular piezo Ceramic (.: //www.rockwell.com/anorad/products/airbearing systems/ntype/n250.html motors are most commonly used in metrology and scanning equipment of dual CFR.. Explained referring to accompanying drawings high speed more vibrators against the driven body,. The Frequency is increased, the maximum no-load speed of the rail interface, traveling-wave vibration and standing-wave vibration dual. M Kuwana, T Kanbara, M Kuwana, T Kanbara, M Kuwana, T,... Vibrating, the maximum no-load velocity of combined slider of dual of.! The heart of each motor / actuator is a linear ultrasonic piezo motors a. Of the rail commonly used in many consumer and office electronics requiring precision rotations long. Of PZT ceramics are studied and Exposition, 2004. http: //www.rockwell.com/anorad/products/airbearing.... Movement prevention means is a rectangular piezo Ceramic plate ( the stator ) Chunsheng! ; and vibration coupled type linear ultrasonic motor with large thrust and stroke...